The Syrian government and rebel forces have begun an operation to move people away from four besieged towns, activists say.
People from Foah and Kefraya, two government-held towns in the north-west, have arrived in Rashideen, west of Aleppo, AFP news agency reports.
Similar operations have begun in rebel-held Madaya and Zabadani, near Damascus.
More than 30,000 people are expected to be evacuated under the deal.
Last month, the UN described the situation in the four towns as "catastrophic", with more than 64,000 civilians "trapped in a cycle of daily violence and deprivation".
Many people are reported to have died as a result of shortages of food or medicine.
Foah and Kefraya, most of whose residents are Shia Muslims, have been encircled by rebels and al-Qaeda-linked Sunni jihadists since March 2015.
Madaya and Zabadani, which are predominantly Sunni, have meanwhile been besieged since June 2015 by the Syrian army and fighters from Lebanon's Shia Islamist Hezbollah movement.
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